Improvements in the Disilane Plasma Deposition of Hydrogenated Amorphous Silicon Solar Cells

doi:10.1016/0379-6787(87)90116-5

Improvements in the Disilane Plasma Deposition of Hydrogenated Amorphous Silicon Solar Cells

Research output: Contribution to journal › Article

Original language	American English
Pages (from-to)	167-175
Number of pages	9
Journal	Solar Cells
Volume	21
Issue number	Complete
DOIs	https://doi.org/10.1016/0379-6787(87)90116-5
State	Published - 1987

Bibliographical note

Work performed by Metallurgy and Materials Science Division, Brookhaven National Laboratory, Upton, New York and Department of Materials Science and Engineering, State University of New York, Stony Brook, New York

NREL Publication Number

ACNR/JA-9348

Access to Document

10.1016/0379-6787(87)90116-5

Cite this

@article{b8d67d7cdfbe4337b238e7808547f116,

title = "Improvements in the Disilane Plasma Deposition of Hydrogenated Amorphous Silicon Solar Cells",

author = "NREL",

note = "Work performed by Metallurgy and Materials Science Division, Brookhaven National Laboratory, Upton, New York and Department of Materials Science and Engineering, State University of New York, Stony Brook, New York",

year = "1987",

doi = "10.1016/0379-6787(87)90116-5",

language = "American English",

volume = "21",

pages = "167--175",

journal = "Solar Cells",

issn = "0379-6787",

publisher = "Elsevier B.V.",

number = "Complete",

}

TY - JOUR

T1 - Improvements in the Disilane Plasma Deposition of Hydrogenated Amorphous Silicon Solar Cells

AU - NREL, null

N1 - Work performed by Metallurgy and Materials Science Division, Brookhaven National Laboratory, Upton, New York and Department of Materials Science and Engineering, State University of New York, Stony Brook, New York

PY - 1987

Y1 - 1987

U2 - 10.1016/0379-6787(87)90116-5

DO - 10.1016/0379-6787(87)90116-5

M3 - Article

SN - 0379-6787

VL - 21

SP - 167

EP - 175

JO - Solar Cells

JF - Solar Cells

IS - Complete

ER -