Impurity/Defect Analysis of HEM Silicon

NREL

    Research output: Contribution to conference › Paper

    Original languageAmerican English
    Pages13-18
    Number of pages6
    StatePublished - 1994
    EventRole of Point Defects and Defect Complexes in Silicon Device Processing: Third Workshop - Vail, Colorado
    Duration: 16 Aug 1993 → 18 Aug 1993

    Conference

    ConferenceRole of Point Defects and Defect Complexes in Silicon Device Processing: Third Workshop
    CityVail, Colorado
    Period16/08/93 → 18/08/93

    NREL Publication Number

    • ACNR/CP-15588

    Cite this