In-Situ Characterization of the Amorphous to Microscrystalline Transition in Hot Wire CVD Growth of Si:H Using Real Time Spectroscopic Ellipsometry

D. H. Levi, B. P. Nelson, J. D. Perkins, H. R. Moutinho

Research output: Contribution to conferencePaperpeer-review

2 Scopus Citations

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