In situ Optical Diagnostic for Monitoring or Control of Sodium Diffusion in Photovoltaics Manufacturing

Dean Levi; Stephen Glynn; Miguel Contreras

In situ Optical Diagnostic for Monitoring or Control of Sodium Diffusion in Photovoltaics Manufacturing

Dean Levi (Inventor), Stephen Glynn (Inventor), Miguel Contreras (Inventor)

Research output: Patent

Abstract

A method of fabricating a photovoltaic device 100, includes the steps of providing a glass substrate 102, depositing a molybdenum layer 104 on a surface of the glass substrate, directing light through the glass substrate to the near-substrate region of the molybdenum layer 206, detecting an optical property of the near-substrate region of the molybdenum layer after interaction with the incident light 208 and determining a density of the near-substrate region of the molybdenum layer from the detected optical property 210. A molybdenum deposition parameter may be controlled based upon the determined density of the near-substrate region of the molybdenum layer 218. A non-contact method measures a density of the near-substrate region of a molybdenum layer and a deposition chamber 300.

Original language	American English
Patent number	9,136,184 B2
Filing date	15/09/15
State	Published - 2015

NREL Publication Number

NREL/PT-5J00-65247

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Access to Document

https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/9136184

Cite this

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title = "In situ Optical Diagnostic for Monitoring or Control of Sodium Diffusion in Photovoltaics Manufacturing",

abstract = "A method of fabricating a photovoltaic device 100, includes the steps of providing a glass substrate 102, depositing a molybdenum layer 104 on a surface of the glass substrate, directing light through the glass substrate to the near-substrate region of the molybdenum layer 206, detecting an optical property of the near-substrate region of the molybdenum layer after interaction with the incident light 208 and determining a density of the near-substrate region of the molybdenum layer from the detected optical property 210. A molybdenum deposition parameter may be controlled based upon the determined density of the near-substrate region of the molybdenum layer 218. A non-contact method measures a density of the near-substrate region of a molybdenum layer and a deposition chamber 300.",

author = "Dean Levi and Stephen Glynn and Miguel Contreras",

year = "2015",

language = "American English",

type = "Patent",

note = "9,136,184 B2",

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TY - PAT

T1 - In situ Optical Diagnostic for Monitoring or Control of Sodium Diffusion in Photovoltaics Manufacturing

AU - Levi, Dean

AU - Glynn, Stephen

AU - Contreras, Miguel

PY - 2015

Y1 - 2015

N2 - A method of fabricating a photovoltaic device 100, includes the steps of providing a glass substrate 102, depositing a molybdenum layer 104 on a surface of the glass substrate, directing light through the glass substrate to the near-substrate region of the molybdenum layer 206, detecting an optical property of the near-substrate region of the molybdenum layer after interaction with the incident light 208 and determining a density of the near-substrate region of the molybdenum layer from the detected optical property 210. A molybdenum deposition parameter may be controlled based upon the determined density of the near-substrate region of the molybdenum layer 218. A non-contact method measures a density of the near-substrate region of a molybdenum layer and a deposition chamber 300.

AB - A method of fabricating a photovoltaic device 100, includes the steps of providing a glass substrate 102, depositing a molybdenum layer 104 on a surface of the glass substrate, directing light through the glass substrate to the near-substrate region of the molybdenum layer 206, detecting an optical property of the near-substrate region of the molybdenum layer after interaction with the incident light 208 and determining a density of the near-substrate region of the molybdenum layer from the detected optical property 210. A molybdenum deposition parameter may be controlled based upon the determined density of the near-substrate region of the molybdenum layer 218. A non-contact method measures a density of the near-substrate region of a molybdenum layer and a deposition chamber 300.

M3 - Patent

M1 - 9,136,184 B2

Y2 - 2015/09/15

ER -

In situ Optical Diagnostic for Monitoring or Control of Sodium Diffusion in Photovoltaics Manufacturing

Abstract

NREL Publication Number

UN SDGs

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