In-Situ Sensors for Process Control of CuIn(Ga)Se2 Module Deposition: Final Report, August 15, 2001

Research output: NRELSubcontract Report

Abstract

This report describes several aspects of in-situ sensors for CIGs module deposition that were explored. First, a composition sensor based on X-ray fluorescence (XRF) was developed that serves as a useful indicator of composition and thickness of CIGS; contains only low-cost, commercially available components; has been verified for accuracy of both in-situ and ex-situ results; has been exposed toover 600 hours of heated Se ambient without detriment; was improved for a 20% increase in signal-to-noise on the second design iteration; and has been used in closed-loop control of CIGS deposition. The XRF sensor is clearly applicable to in-situ CIGS deposition, but is less appropriate for other layers in the module. Second, non-contract infrared thermometry was designed for substratetemperature and emissivity measurement during CIGS deposition. Preliminary measurements have confirmed the validity of the design. However, a number of items remain for future work, including full in-situ testing. Finally, optical emission spectroscopy was considered for control of Se, Cu, In, and Ga rates, but was not pursued due to limited applicability.
Original languageAmerican English
Number of pages36
StatePublished - 2001

Bibliographical note

Work performed by ITN Energy Systems, Inc., Littleton, Colorado

NREL Publication Number

  • NREL/SR-520-30870

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