Abstract
We investigate electrical stressing and switching in hydrogenated microcrystalline silicon (μc-Si:H) by thermal, and optical and electrical measurements of Cr/μc-Si:H/metal thin-film structures. Boron-doped microcrystalline Si films of 30-50 nm thick are deposited by hot-wire chemical vapor deposition (HWCVD) on Cr-coated glass at 160°C and contacted with Ag or Al. Switching in devices of size 5 to 30 μm is stimulated by a current-ramp from 10 nA to 50 mA. We find that the voltage across the μc-Si: H devices initially increases logarithmically with current, then saturates at 2-3 V, and finally drops to a low value of 1 to 1.5 V. This drop indicates a permanent decrease of device resistance to below 1 kΩ. During current stressing, the surface temperature increases with the bias current, and the surface reflectivity changes. After switching, a small increase in crystalline fraction can be observed by micro-Raman scattering measurements. The observations suggest electrothermal processes which cause changes in microstructure of the (μc-Si bulk during current stress.
Original language | American English |
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Pages | 459-464 |
Number of pages | 6 |
DOIs | |
State | Published - 2004 |
Event | Amorphous and Nanocrystalline Silicon Science and Technology - 2004 - San Francisco, CA, United States Duration: 13 Apr 2004 → 16 Apr 2004 |
Conference
Conference | Amorphous and Nanocrystalline Silicon Science and Technology - 2004 |
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Country/Territory | United States |
City | San Francisco, CA |
Period | 13/04/04 → 16/04/04 |
NREL Publication Number
- NREL/CP-520-37515