Increase of Temperature and Crystallinity during Electrical Switching in Microcrystalline Silicon

Jian Hu, Paul Stradins, Howard M. Branz, Qi Wang, J. R. Weinberg-Wolf, E. C.T. Harley, Chris Lawyer, Brittany Huie, Daxing Han

Research output: Contribution to conferencePaperpeer-review

1 Scopus Citations

Abstract

We investigate electrical stressing and switching in hydrogenated microcrystalline silicon (μc-Si:H) by thermal, and optical and electrical measurements of Cr/μc-Si:H/metal thin-film structures. Boron-doped microcrystalline Si films of 30-50 nm thick are deposited by hot-wire chemical vapor deposition (HWCVD) on Cr-coated glass at 160°C and contacted with Ag or Al. Switching in devices of size 5 to 30 μm is stimulated by a current-ramp from 10 nA to 50 mA. We find that the voltage across the μc-Si: H devices initially increases logarithmically with current, then saturates at 2-3 V, and finally drops to a low value of 1 to 1.5 V. This drop indicates a permanent decrease of device resistance to below 1 kΩ. During current stressing, the surface temperature increases with the bias current, and the surface reflectivity changes. After switching, a small increase in crystalline fraction can be observed by micro-Raman scattering measurements. The observations suggest electrothermal processes which cause changes in microstructure of the (μc-Si bulk during current stress.

Original languageAmerican English
Pages459-464
Number of pages6
DOIs
StatePublished - 2004
EventAmorphous and Nanocrystalline Silicon Science and Technology - 2004 - San Francisco, CA, United States
Duration: 13 Apr 200416 Apr 2004

Conference

ConferenceAmorphous and Nanocrystalline Silicon Science and Technology - 2004
Country/TerritoryUnited States
CitySan Francisco, CA
Period13/04/0416/04/04

NREL Publication Number

  • NREL/CP-520-37515

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