Influence of Discharge Current on the Intrinsic Stress in Mo Films Deposited Using Cylindrical and Planar Magnetron Sputtering Sources

    Research output: Contribution to journalArticle

    Original languageAmerican English
    Pages (from-to)576-579
    Number of pages4
    JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
    Issue number3, Part I
    StatePublished - 1985

    Bibliographical note

    Work performed by Coordinated Science Laboratory and Department of Metallurgy, University of Illinois, Urbana, Illinois, and Ford Motor Company, Dearborn, Michigan

    NREL Publication Number

    • ACNR/JA-6710

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