Abstract
Al and N co-doped ZnO thin films, ZnO:(Al,N), are synthesized by radio-frequency magnetron sputtering in mixed Ar and N2 and mixed O2 and N2 gas ambient at 100 °C. The ZnO:(Al,N) films deposited in mixed Ar and N2 gas ambient did not incorporate N, whereas ZnO:(Al,N) films grown in mixed O2 and N2 gas ambient showed enhanced N incorporation and crystallinity as compared to ZnO:N thin films grown in the same gas ambient. As a result, ZnO:(Al,N) films grown in mixed O2 and N2 gas ambient showed higher photocurrents than the ZnO:(Al,N) thin films deposited in mixed Ar and N2 gas ambient. Our results indicate that the gas ambient plays an important role in N incorporation and crystallinity control in Al and N co-doped ZnO thin films.
Original language | American English |
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Pages (from-to) | 5801-5805 |
Number of pages | 5 |
Journal | Journal of Power Sources |
Volume | 195 |
Issue number | 17 |
DOIs | |
State | Published - 2010 |
NREL Publication Number
- NREL/JA-520-45947
Keywords
- Bandgap
- Co-doping
- Gas ambient
- Photoelectrochemical
- ZnO
- ZnO:(Al,N)