Influence of Plasma Chemistry on the Properties of a-(si,Ge):H Alloys

Research output: Contribution to journalArticlepeer-review

Original languageAmerican English
Pages (from-to)675-679
Number of pages5
JournalJournal of Non-Crystalline Solids
Volume266-269
DOIs
StatePublished - 2000

NREL Publication Number

  • NREL/JA-520-28648

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