Influence of Plasma Chemistry on the Properties of a-(si,Ge):H Alloys

Research output: Contribution to journal › Article › peer-review

Original language	American English
Pages (from-to)	675-679
Number of pages	5
Journal	Journal of Non-Crystalline Solids
Volume	266-269
DOIs	https://doi.org/10.1016/S0022-3093(00)00034-X
State	Published - 2000

NREL Publication Number

@article{52b4e7a7f8d54201b66a46b8ea35e661,

title = "Influence of Plasma Chemistry on the Properties of a-(si,Ge):H Alloys",

author = "NREL",

year = "2000",

doi = "10.1016/S0022-3093(00)00034-X",

language = "American English",

volume = "266-269",

pages = "675--679",

journal = "Journal of Non-Crystalline Solids",

issn = "0022-3093",

publisher = "Elsevier B.V.",

}