Influence of Pressure and Annealing on the Microstructural and Electro-Optical Properties of RF Magnetron Sputtered ITO Thin Films

Research output: Contribution to journalArticlepeer-review

Original languageAmerican English
Pages (from-to)993-1003
Number of pages11
JournalMaterials Research Bulletin
Volume39
DOIs
StatePublished - 2004

NREL Publication Number

  • NREL/JA-520-36895

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