Integrating Deposition, Processing, and Characterization Equipment within the National Center for Photovoltaics

    Research output: Contribution to conferencePaper

    Abstract

    The purpose of the process integration project of the National Center for Photovoltaics (NCPV) is to develop an infrastructure that will allow researchers to gain new knowledge that is difficult--if not impossible--to obtain with existing equipment. This difficulty is due, in part, to the state of our existing tool set, which lacks sufficient in-situ or real-time measurement capabilities, orlacks access to analytical tools where the sample remains in a controlled environment between deposition and processing or measurement. This new infrastructure will provide flexible and robust integration of deposition, processing (etching, annealing, etc.), and characterization tools via a standardized transfer interface such that samples move between tools in a controlled ambient. Ultimately,this synergistic effort between NREL staff, universities, and the photovoltaic (PV) industry--around an integrated tool base--will add to the PV knowledge base and help move many PV technologies forward.
    Original languageAmerican English
    Number of pages5
    StatePublished - 2005
    Event2005 DOE Solar Energy Technologies Program Review Meeting - Denver, Colorado
    Duration: 7 Nov 200510 Nov 2005

    Conference

    Conference2005 DOE Solar Energy Technologies Program Review Meeting
    CityDenver, Colorado
    Period7/11/0510/11/05

    Bibliographical note

    Presented at the 2005 DOE Solar Energy Technologies Program Review Meeting held November 7-10, 2005 in Denver, Colorado. Also included in the proceedings available on CD-ROM (DOE/GO-102006-2245; NREL/CD-520-38557)

    NREL Publication Number

    • NREL/CP-520-39011

    Keywords

    • characterizations
    • equipment
    • NREL
    • photovoltaics (PV)
    • PV
    • solar

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