| Original language | American English |
|---|---|
| Pages (from-to) | 1779-1787 |
| Number of pages | 9 |
| Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
| Volume | 14 |
| Issue number | 3 |
| DOIs | |
| State | Published - 1996 |
NREL Publication Number
- NREL/JA-412-20126