Original language | American English |
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Pages (from-to) | 2685-2691 |
Number of pages | 7 |
Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
Volume | 17 |
Issue number | 5 |
DOIs | |
State | Published - 1999 |
NREL Publication Number
- NREL/JA-520-27907