| Original language | American English |
|---|---|
| Pages (from-to) | 2685-2691 |
| Number of pages | 7 |
| Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
| Volume | 17 |
| Issue number | 5 |
| DOIs | |
| State | Published - 1999 |
NREL Publication Number
- NREL/JA-520-27907