| Original language | American English |
|---|---|
| Pages (from-to) | 1787-1792 |
| Number of pages | 6 |
| Journal | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
| Volume | 10 |
| Issue number | 4 |
| DOIs | |
| State | Published - 1992 |
NREL Publication Number
- ACNR/JA-412-13126