@article{45d43041895a47308cdb167e5474bc9a,
title = "Internal Contacts to Photovoltaic Structures Using Ion Beam Milling",
author = "NREL",
note = "Work performed by Department of Physics, Colorado State University, Fort Collins, Colorado",
year = "1983",
doi = "10.1116/1.572126",
language = "American English",
volume = "1",
pages = "331--333",
journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films",
issn = "0734-2101",
publisher = "AVS Science and Technology Society",
number = "2 Part I",
}