| Original language | American English |
|---|---|
| Pages (from-to) | 1912-1916, Part I |
| Number of pages | 5 |
| Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
| Volume | 8 |
| Issue number | 3 |
| DOIs | |
| State | Published - 1990 |
NREL Publication Number
- ACNR/JA-213-11623