Ion Beam Hydrogenation of Amorphous Silicon

Research output: Contribution to journal › Article

NREL Publication Number

@article{e49b1a1bb87640c585b82160034c3433,

title = "Ion Beam Hydrogenation of Amorphous Silicon",

author = "NREL",

year = "1987",

doi = "10.1063/1.98649",

language = "American English",

volume = "51",

pages = "1436--1438",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

number = "18",

}