Ion Beam Rehydrogenation and Post-Hydrogenation of a-Si:H

Research output: Contribution to journal › Article

NREL Publication Number

@article{d22caee33ef14037bcda13bc655527df,

title = "Ion Beam Rehydrogenation and Post-Hydrogenation of a-Si:H",

author = "NREL",

year = "1988",

doi = "10.1063/1.341800",

language = "American English",

volume = "64",

pages = "1604--1607",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

number = "3",

}