Ion Chemistry in Silane dc Discharges

doi:10.1063/1.335702

Ion Chemistry in Silane dc Discharges

Research output: Contribution to journal › Article

Original language	American English
Pages (from-to)	159-169
Number of pages	11
Journal	Journal of Applied Physics
Volume	58
Issue number	1
DOIs	https://doi.org/10.1063/1.335702
State	Published - 1985

Bibliographical note

Work performed by Joint Institute for Laboratory Astrophysics, University of Colorado, and the National Bureau of Standards, Boulder, Colorado

NREL Publication Number

ACNR/JA-6630

Access to Document

10.1063/1.335702

Cite this

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title = "Ion Chemistry in Silane dc Discharges",

author = "NREL",

note = "Work performed by Joint Institute for Laboratory Astrophysics, University of Colorado, and the National Bureau of Standards, Boulder, Colorado",

year = "1985",

doi = "10.1063/1.335702",

language = "American English",

volume = "58",

pages = "159--169",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

number = "1",

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PY - 1985

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