Ion Chemistry in Silane dc Discharges

    Research output: Contribution to journalArticle

    Original languageAmerican English
    Pages (from-to)159-169
    Number of pages11
    JournalJournal of Applied Physics
    Issue number1
    StatePublished - 1985

    Bibliographical note

    Work performed by Joint Institute for Laboratory Astrophysics, University of Colorado, and the National Bureau of Standards, Boulder, Colorado

    NREL Publication Number

    • ACNR/JA-6630

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