| Original language | American English |
|---|---|
| Title of host publication | Impurity Doping in Silicon |
| Subtitle of host publication | Materials Processing Theory and Practices, Volme 2 |
| Editors | F. F. Y. Wang |
| Pages | 55-146 |
| DOIs | |
| State | Published - 1981 |
NLR Publication Number
- ACNR/CH-211-6965