| Original language | American English |
|---|---|
| Pages (from-to) | 1671-1674 |
| Number of pages | 4 |
| Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
| Volume | 4 |
| Issue number | 3, Part II |
| DOIs | |
| State | Published - 1986 |
NREL Publication Number
- ACNR/JA-255-6543