Laser In Situ Diagnostics and Process Modeling of Glow Discharge Amorphous Silicon Deposition

Laser In Situ Diagnostics and Process Modeling of Glow Discharge Amorphous Silicon Deposition

Research output: Contribution to conference › Paper

Original language	American English
Pages	39-48
Number of pages	10
State	Published - 1987
Event	1987 Amorphous Silicon Subcontractors' Review Meeting - Palo Alto, California Duration: 26 Jan 1987 → 27 Jan 1987

Conference

Conference	1987 Amorphous Silicon Subcontractors' Review Meeting
City	Palo Alto, California
Period	26/01/87 → 27/01/87

Bibliographical note

Work performed by Jet Propulsion Laboratory, Pasadena, California

NREL Publication Number

ACNR/CP-8741

Cite this

@conference{d56a10259e084c0e84c4d4acc323af60,

title = "Laser In Situ Diagnostics and Process Modeling of Glow Discharge Amorphous Silicon Deposition",

author = "NREL",

note = "Work performed by Jet Propulsion Laboratory, Pasadena, California; 1987 Amorphous Silicon Subcontractors' Review Meeting ; Conference date: 26-01-1987 Through 27-01-1987",

year = "1987",

language = "American English",

pages = "39--48",

}