LiCoO2 Thin Films Grown by Pulsed Laser Deposition on Low Cost Substrates

D. S. Ginley, J. D. Perkins, J. M. McGraw, P. A. Parilla, M. L. Fu, C. T. Rogers

Research output: Contribution to conferencePaperpeer-review

15 Scopus Citations

Abstract

We report on the use of pulsed laser deposition (PLD) to grow thin films of LiCoO2 on a number of low cost substrates including SnO2 coated Upilex, stainless steel and SnO2 coated glass. Highly textured (001) films grown on CVD deposited SnO2 films on 7059 glass, were obtained at 200 to 500 mTorr O2 and a temperature of 500 C. Similar texture was not obtained on the stainless or Upilex however dense films from crystalline to amorphous were obtained. The films were characterized by x-ray diffraction and Raman spectroscopy.

Original languageAmerican English
Pages293-302
Number of pages10
StatePublished - 1998
EventProceedings of the 1998 MRS Fall Symposium - Boston, MA, USA
Duration: 1 Dec 19975 Dec 1997

Conference

ConferenceProceedings of the 1998 MRS Fall Symposium
CityBoston, MA, USA
Period1/12/975/12/97

NREL Publication Number

  • NREL/CP-520-25597

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