Liquid Precursor for Deposition of Indium Selenide and Method of Preparing the Same

Calvin Curtis; David Ginley; Alexander Miedaner; Marinus Antonius; Maria Hest; Louay Eldada; Billy Stanbery

Liquid Precursor for Deposition of Indium Selenide and Method of Preparing the Same

Calvin Curtis (Inventor), David Ginley (Inventor), Alexander Miedaner (Inventor), Marinus Antonius (Inventor), Maria Hest (Inventor), Louay Eldada (Inventor), Billy Stanbery (Inventor)

Research output: Patent

Abstract

Liquid precursors containing indium and selenium suitable for deposition on a substrate to form thin films suitable for semiconductor applications are disclosed. Methods of preparing such liquid precursors and method of depositing a liquid precursor on a substrate are also disclosed.

Original language	American English
Patent number	9,142,408 B2
Filing date	22/09/15
State	Published - 2015

NREL Publication Number

NREL/PT-5900-65251

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title = "Liquid Precursor for Deposition of Indium Selenide and Method of Preparing the Same",

abstract = "Liquid precursors containing indium and selenium suitable for deposition on a substrate to form thin films suitable for semiconductor applications are disclosed. Methods of preparing such liquid precursors and method of depositing a liquid precursor on a substrate are also disclosed.",

author = "Calvin Curtis and David Ginley and Alexander Miedaner and Marinus Antonius and Maria Hest and Louay Eldada and Billy Stanbery",

year = "2015",

language = "American English",

type = "Patent",

note = "9,142,408 B2",

}

TY - PAT

T1 - Liquid Precursor for Deposition of Indium Selenide and Method of Preparing the Same

AU - Curtis, Calvin

AU - Ginley, David

AU - Miedaner, Alexander

AU - Antonius, Marinus

AU - Hest, Maria

AU - Eldada, Louay

AU - Stanbery, Billy

PY - 2015

Y1 - 2015

N2 - Liquid precursors containing indium and selenium suitable for deposition on a substrate to form thin films suitable for semiconductor applications are disclosed. Methods of preparing such liquid precursors and method of depositing a liquid precursor on a substrate are also disclosed.

AB - Liquid precursors containing indium and selenium suitable for deposition on a substrate to form thin films suitable for semiconductor applications are disclosed. Methods of preparing such liquid precursors and method of depositing a liquid precursor on a substrate are also disclosed.

M3 - Patent

M1 - 9,142,408 B2

Y2 - 2015/09/22

ER -

Liquid Precursor for Deposition of Indium Selenide and Method of Preparing the Same

Abstract

NREL Publication Number

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