Lithium Nitride Coatings Deposited by Magnetron Sputtering on Sulfide Electrolytes for Solid-State Batteries

Lithium nitrides have been considered as promising candidates for interfacial layers in solid-state lithium batteries (SSBs). Previously reported lithium nitride (Li₃N) coatings were mostly prepared by the reaction between lithium metal and nitrogen gas, which makes it challenging for their thickness control and integration in SSBs. Here we prepare Li₃N via magnetron sputtering for the first time, and apply the resulting coating directly on sulfide solid-state electrolyte. A much smaller impedance increase associated with improved cycling performance is observed in lithium metal symmetric cell. These results demonstrate the feasibility of depositing Li₃N via magnetron sputtering and its application in SSBs. Graphical abstract: [Figure not available: see fulltext.]