Lithography-Free Mesa Isolation of III-V Solar Cells Through Laser Ablation

Theresa Saenz, Daniel Curry, AJ Gray, Ryan Muzzio, Jackson Schall, Myles Steiner

Research output: Contribution to journalArticlepeer-review

Abstract

Eliminating photolithography from solar cell processing is a significant opportunity for cost reduction for III-V solar cells. In this work, we explore femtosecond laser ablation as an alternative to contact photolithography and wet chemical etching for mesa isolation. We demonstrate both GaAs and GaInP solar cells mesa-isolated by femtosecond laser ablation with minimal to no loss in solar cell performance. We show the best results with a 400 fs UV pulsed laser and a short clean-up etch that also serves as a contact layer removal etch.
Original languageAmerican English
Pages (from-to)110-116
Number of pages7
JournalIEEE Journal of Photovoltaics
Volume15
Issue number1
DOIs
StatePublished - 2025

NREL Publication Number

  • NREL/JA-5900-90418

Keywords

  • III-V semiconductor materials
  • laser ablation
  • optoelectronic devices
  • photovoltaic (PV) cells
  • semiconductor device manufacture
  • semiconductor thin films

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