@article{0a87f4faf511498bb42077b25fdd048a,
title = "Low Defect Density a-Si,Ge:H Alloy Films Produced by Magnetron Sputtering from Separate Si and Ge Cathodes",
author = "NREL",
note = "Work performed by Department of Physics, North Carolina State University, Raleigh, North Carolina",
year = "1985",
doi = "10.1016/0022-3093(85)90802-6",
language = "American English",
volume = "77 & 78",
pages = "885--888",
journal = "Journal of Non-Crystalline Solids",
issn = "0022-3093",
publisher = "Elsevier B.V.",
number = "Part II",
}