Low Defect Density Microcrystalline-Si Deposited by the Hot Wire Technique

Low Defect Density Microcrystalline-Si Deposited by the Hot Wire Technique

Research output: Contribution to conference › Paper

Original language	American English
Pages	825-830
Number of pages	6
State	Published - 1999
Event	Amorphous and Microcrystalline Silicon Technology 1998: Materials Research Society Symposium - San Francisco, California Duration: 14 Apr 1998 → 17 Apr 1998

Conference

Conference	Amorphous and Microcrystalline Silicon Technology 1998: Materials Research Society Symposium
City	San Francisco, California
Period	14/04/98 → 17/04/98

NREL Publication Number

NREL/CP-520-24611

Cite this

@conference{4fcd161e6a314091a96858ef649782f3,

title = "Low Defect Density Microcrystalline-Si Deposited by the Hot Wire Technique",

author = "NREL",

year = "1999",

language = "American English",

pages = "825--830",

note = "Amorphous and Microcrystalline Silicon Technology 1998: Materials Research Society Symposium ; Conference date: 14-04-1998 Through 17-04-1998",

}