Low-Power Deposition of Fluorinated Microcrystalline Silicon Hydrogen Alloy Films

Material Science

• Film 100%
• Microcrystalline Silicon 100%
• Photoconductivity 50%
• Silicon 50%
• Density 50%
• Diffraction Pattern 50%
• Dilution 50%
• Crystal Structure 50%

Engineering

• Microcrystalline Silicon 100%
• Power Density 50%
• Hydrogen Dilution 50%
• Radio Frequency 50%
• Glow Discharge 50%
• Infrared Absorption 50%
• Crystal Structure 50%