Low-Power Deposition of Fluorinated Microcrystalline Silicon Hydrogen Alloy Films

  • Swati Ray
  • , S. C. De
  • , Gautam Ganguly
  • , A. K. Barua
  • , A. J. Mascarenhas
  • , M. M. Al-Jassim
  • , S. K. Deb

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7 Scopus Citations

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