@article{ce382ec5c7134c928e4b4e6a4aa1d232,
title = "Low Temperature Deposition of Amorphous Silicon Oxide and Silicon Nitride Films",
author = "NREL",
note = "Work performed by Department of Physics, North Carolina State University, Raleigh, North Carolina",
year = "1985",
doi = "10.1016/0022-3093(85)90812-9",
language = "American English",
volume = "77 & 78",
pages = "925--928",
journal = "Journal of Non-Crystalline Solids",
issn = "0022-3093",
publisher = "Elsevier B.V.",
number = "Part II",
}