Low Temperature Junction Growth Using Hot-Wire Chemical Vapor Deposition

Matthew Page; Qi Wang; Eugene Iwaniczko; Tihu Wang; Yanfa Yan

Low Temperature Junction Growth Using Hot-Wire Chemical Vapor Deposition

Matthew Page (Inventor), Qi Wang (Inventor), Eugene Iwaniczko (Inventor), Tihu Wang (Inventor), Yanfa Yan (Inventor)

Chemistry and Nanoscience

National Renewable Energy Laboratory

Research output: Patent

Abstract

A system and a process for forming a semi-conductor device, and solar cells (10) formed thereby. The process includes preparing a substrate (12) for deposition of a junction layer (14); forming the junction layer (14) on the substrate (12) using hot wire chemical vapor deposition; and, finishing the semi-conductor device.

Original language	American English
Patent number	8,642,450 B2
Filing date	4/02/14
State	Published - 2014

NREL Publication Number

NREL/PT-5J00-70232

Keywords

chemical vapor
junction layer
semi-conductor
solar cells
substrate

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Cite this

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title = "Low Temperature Junction Growth Using Hot-Wire Chemical Vapor Deposition",

abstract = "A system and a process for forming a semi-conductor device, and solar cells (10) formed thereby. The process includes preparing a substrate (12) for deposition of a junction layer (14); forming the junction layer (14) on the substrate (12) using hot wire chemical vapor deposition; and, finishing the semi-conductor device.",

keywords = "chemical vapor, junction layer, semi-conductor, solar cells, substrate",

author = "Matthew Page and Qi Wang and Eugene Iwaniczko and Tihu Wang and Yanfa Yan",

year = "2014",

language = "American English",

type = "Patent",

note = "8,642,450 B2",

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TY - PAT

T1 - Low Temperature Junction Growth Using Hot-Wire Chemical Vapor Deposition

AU - Page, Matthew

AU - Wang, Qi

AU - Iwaniczko, Eugene

AU - Wang, Tihu

AU - Yan, Yanfa

PY - 2014

Y1 - 2014

N2 - A system and a process for forming a semi-conductor device, and solar cells (10) formed thereby. The process includes preparing a substrate (12) for deposition of a junction layer (14); forming the junction layer (14) on the substrate (12) using hot wire chemical vapor deposition; and, finishing the semi-conductor device.

AB - A system and a process for forming a semi-conductor device, and solar cells (10) formed thereby. The process includes preparing a substrate (12) for deposition of a junction layer (14); forming the junction layer (14) on the substrate (12) using hot wire chemical vapor deposition; and, finishing the semi-conductor device.

KW - chemical vapor

KW - junction layer

KW - semi-conductor

KW - solar cells

KW - substrate

M3 - Patent

M1 - 8,642,450 B2

Y2 - 2014/02/04

ER -

Low Temperature Junction Growth Using Hot-Wire Chemical Vapor Deposition

Abstract

NREL Publication Number

Keywords

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