Low Temperature Junction Growth Using Hot-Wire Chemical Vapor Deposition

  • Matthew Page (Inventor)
  • , Qi Wang (Inventor)
  • , Eugene Iwaniczko (Inventor)
  • , Tihu Wang (Inventor)
  • , Yanfa Yan (Inventor)

Research output: Patent

Abstract

A system and a process for forming a semi-conductor device, and solar cells (10) formed thereby. The process includes preparing a substrate (12) for deposition of a junction layer (14); forming the junction layer (14) on the substrate (12) using hot wire chemical vapor deposition; and, finishing the semi-conductor device.
Original languageAmerican English
Patent number8,642,450 B2
Filing date4/02/14
StatePublished - 2014

NLR Publication Number

  • NREL/PT-5J00-70232

Keywords

  • chemical vapor
  • junction layer
  • semi-conductor
  • solar cells
  • substrate

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