Abstract
A system and a process for forming a semi-conductor device, and solar cells (10) formed thereby. The process includes preparing a substrate (12) for deposition of a junction layer (14); forming the junction layer (14) on the substrate (12) using hot wire chemical vapor deposition; and, finishing the semi-conductor device.
| Original language | American English |
|---|---|
| Patent number | 8,642,450 B2 |
| Filing date | 4/02/14 |
| State | Published - 2014 |
NLR Publication Number
- NREL/PT-5J00-70232
Keywords
- chemical vapor
- junction layer
- semi-conductor
- solar cells
- substrate