Low-Temperature Silicon Homoepitaxy by Hot-Wire Chemical Vapor Deposition with a Ta Filament

  • Charles W. Teplin
  • , Qi Wang
  • , Eugene Iwaniczko
  • , Kim M. Jones
  • , Mowafak Al-Jassim
  • , Robert C. Reedy
  • , Howard M. Branz

Research output: Contribution to journal › Article › peer-review

27 Scopus Citations

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