Low Temperature Si/SiOx/pc-Si Passivated Contacts to n-Type Si Solar Cells

Bill Nemeth, David L. Young, Hao Chih Yuan, Vincenzo Lasalvia, Andrew G. Norman, Matthew Page, Benjamin G. Lee, Paul Stradins

Research output: Contribution to conferencePaperpeer-review

20 Scopus Citations


We describe the design, fabrication, and results of low-recombination, passivated contacts to n-type silicon utilizing thin SiOx, and plasma enhanced chemical vapor deposited doped polycrystalline-silicon (pc-Si) layers. A low-temperature silicon dioxide layer is grown on both surfaces of an n-type CZ wafer to a thickness of <20 Å. Next, a thin layer of P-doped plasma enhanced chemical vapor deposited amorphous silicon (n/a-Si:H) is deposited on top of the SiOx. The layers are annealed to crystallize the a-Si:H and diffuse H to the Si/SiOx interface, after which a metal contacting layer is deposited over the conducting pc-Si layer. The contacts are characterized by measuring the recombination current parameter of the full-area contact (Jo,contact) to quantify the passivation quality, and the specific contact resistivity (ρcontact). The Si/SiOx/pc-Si contact has an excellent Jo,contact = 30 fA/cm2 and a good ρcontact = 29.5 mOhm-cm2. Separate processing conditions lowered Jo,contact to 12 fA/cm2. However, the final metallization can substantially degrade this contact and has to be carefully engineered. This contact could be easily incorporated into modern, high-efficiency solar cell designs, benefiting performance and yet simplifying processing by lowering the temperature and growth on only one side of the wafer.

Original languageAmerican English
Number of pages5
StatePublished - 15 Oct 2014
Event40th IEEE Photovoltaic Specialist Conference, PVSC 2014 - Denver, United States
Duration: 8 Jun 201413 Jun 2014


Conference40th IEEE Photovoltaic Specialist Conference, PVSC 2014
Country/TerritoryUnited States

Bibliographical note

Publisher Copyright:
© 2014 IEEE.

NREL Publication Number

  • NREL/CP-5J00-61345


  • passivated contacts
  • polysilicon
  • silicon dioxide
  • silicon solar cells


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