| Original language | American English |
|---|---|
| Pages (from-to) | 1526-1530 |
| Number of pages | 5 |
| Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
| Volume | 10 |
| Issue number | 4, Part II |
| DOIs | |
| State | Published - 1992 |
NLR Publication Number
- NREL/JA-213-4661