Mass Spectrometric Studies of Impurities in Silane and Their Effects on the Electronic Properties of Hydrogenated Amorphous Silicon

    Research output: Contribution to journalArticle

    Original languageAmerican English
    Pages (from-to)3987-3992
    Number of pages6
    JournalJournal of Applied Physics
    Issue number7
    StatePublished - 1983

    Bibliographical note

    Work performed by Division of Metallurgy and Materials Science, Brookhaven National Laboratory, Upton, New York

    NREL Publication Number

    • ACNR/JA-3885

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