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Material Properties of Polysilicon Layers Deposited by Atmospheric Pressure Iodine Vapor Transport
T. H. Wang, T. F. Ciszek, M. Page, Y. Yan, R. Bauer, Q. Wang, J. Casey, R. Reedy, R. Matson, R. Ahrenkiel, M. M. Al-Jassim
Research output: Contribution to conference › Paper › peer-review
7
Scopus Citations