Measurement and Reduction of Water Vapor Content in AsH3 and PH3 Source

    Research output: Contribution to journalArticle

    Original languageAmerican English
    Pages (from-to)921-922
    Number of pages2
    JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
    Issue number3
    StatePublished - 1985

    Bibliographical note

    Work performed by Chevron Research Company, Richmond, California

    NREL Publication Number

    • ACNR/JA-6619

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