Measurement and Use of Plasma Current Waveform in an RF Silane Discharge

Research output: Contribution to conference › Paper

Original language	American English
Pages	410-413
Number of pages	4
State	Published - 1981
Event	Third Symposium on Plasma Processing - Denver, Colorado Duration: 1 Jan 1981 → 1 Jan 1981

Conference	Third Symposium on Plasma Processing
City	Denver, Colorado
Period	1/01/81 → 1/01/81

NREL Publication Number