| Original language | American English |
|---|---|
| Pages | 407-412 |
| Number of pages | 6 |
| State | Published - 1992 |
| Event | Defect Engineering in Semiconductor Growth, Processing and Device Technology: Materials Research Society Spring Meeting - San Francisco, California Duration: 26 Apr 1992 → 1 May 1992 |
Conference
| Conference | Defect Engineering in Semiconductor Growth, Processing and Device Technology: Materials Research Society Spring Meeting |
|---|---|
| City | San Francisco, California |
| Period | 26/04/92 → 1/05/92 |
NLR Publication Number
- NREL/CP-413-4877