Mechanisms Influencing 'Hot-Wire' Deposition of Hydrogenated Amorphous Silicon

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NLR Publication Number

@article{f65e560bd82b4548ab4cd55ff18f64b4,

title = "Mechanisms Influencing 'Hot-Wire' Deposition of Hydrogenated Amorphous Silicon",

author = "NREL",

year = "1997",

doi = "10.1063/1.365998",

language = "American English",

volume = "82",

pages = "1909--1917",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

number = "4",

}