Mechanisms Involved in the Glow-Discharge Deposition of Doped Hydrogenated Amorphous Silicon

Research output: Contribution to journal › Article

Original language	American English
Pages (from-to)	25-30
Number of pages	6
Journal	Journal of Non-Crystalline Solids
Volume	66
Issue number	1,2
DOIs	https://doi.org/10.1016/0022-3093(84)90293-X
State	Published - 1984

Work performed by Division of Metallurgy and Materials Science, Brookhaven National Laboratory, Upton, New York

NREL Publication Number

@article{11c13b2858284855b8430eb2a980bc5f,

title = "Mechanisms Involved in the Glow-Discharge Deposition of Doped Hydrogenated Amorphous Silicon",

author = "NREL",

note = "Work performed by Division of Metallurgy and Materials Science, Brookhaven National Laboratory, Upton, New York",

year = "1984",

doi = "10.1016/0022-3093(84)90293-X",

language = "American English",

volume = "66",

pages = "25--30",

journal = "Journal of Non-Crystalline Solids",

issn = "0022-3093",

publisher = "Elsevier B.V.",

number = "1,2",

}

TY - JOUR

T1 - Mechanisms Involved in the Glow-Discharge Deposition of Doped Hydrogenated Amorphous Silicon

AU - NREL, null

N1 - Work performed by Division of Metallurgy and Materials Science, Brookhaven National Laboratory, Upton, New York

PY - 1984

Y1 - 1984

U2 - 10.1016/0022-3093(84)90293-X

DO - 10.1016/0022-3093(84)90293-X

M3 - Article

SN - 0022-3093

VL - 66

SP - 25

EP - 30

JO - Journal of Non-Crystalline Solids

JF - Journal of Non-Crystalline Solids

IS - 1,2

ER -