Original language | American English |
---|---|
Pages (from-to) | 3415-3418 |
Number of pages | 4 |
Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
Volume | 17 |
Issue number | 6 |
DOIs | |
State | Published - 1999 |
NREL Publication Number
- NREL/JA-520-25235