| Original language | American English |
|---|---|
| Pages (from-to) | 3415-3418 |
| Number of pages | 4 |
| Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
| Volume | 17 |
| Issue number | 6 |
| DOIs | |
| State | Published - 1999 |
NLR Publication Number
- NREL/JA-520-25235