| Original language | American English |
|---|---|
| Pages (from-to) | 2607-2613 |
| Number of pages | 7 |
| Journal | Journal of vacuum science & technology |
| Volume | A 9 |
| Issue number | 5 |
| DOIs | |
| State | Published - 1991 |
NLR Publication Number
- ACNR/JA-213-12557
Research output: Contribution to journal › Article
| Original language | American English |
|---|---|
| Pages (from-to) | 2607-2613 |
| Number of pages | 7 |
| Journal | Journal of vacuum science & technology |
| Volume | A 9 |
| Issue number | 5 |
| DOIs | |
| State | Published - 1991 |