Method and Apparatus for Fabricating a Thin-Film Solar Cell Utilizing a Hot Wire Chemical Vapor Deposition Technique

NREL (Inventor)

    Research output: Patent

    Abstract

    The thin-film solar cell comprises an a-SiGe:H (1.6 eV) n-i-p solar cell having a deposition rate of at least ten ...Ang.../second for the a-SiGe:H intrinsic layer by hot wire chemical vapor deposition. A method for fabricating a thin film solar cell is also provided. The method comprises depositing a n-i-p layer at a deposition rate of at least ten ...Ang.../second for the a-SiGe:H intrinsiclayer.
    Original languageAmerican English
    Patent number7,122,736 B2
    StatePublished - 2006

    NREL Publication Number

    • NREL/PT-520-40989

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