Method and Apparatus for Making Diamond-Like Carbon Films

NREL (Inventor)

    Research output: Patent


    Ion-assisted plasma enhanced deposition of diamond-like carbon (DLC) films on the surface of photovoltaic solar cells is accomplished with a method and apparatus for controlling ion energy. The quality of DLC layers is fine-tuned by a properly biased system of special electrodes and by exact control of the feed gas mixture compositions. Uniform (with degree of non-uniformity of optical parametersless than 5%) large area (more than 110 cm2) DLC films with optical parameters varied within the given range and with stability against harmful effects of the environment are achieved.
    Original languageAmerican English
    Patent number7,459,188 B2
    StatePublished - 2008

    NREL Publication Number

    • NREL/PT-520-44839


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