Method for the Hydrogenation of poly-Si

Qi Wang (Inventor)

Research output: Patent

Abstract

A method for hydrogenating poly-si. Poly-si is placed into the interior of a chamber. A filament is placed into the interior of a chamber. The base pressure of the interior of the chamber is evacuated, preferably to 10.sup.-6 Torr or less. The poly-si is heated for a predetermined poly-si heating time. The filament is heated by providing an electrical power to the filament. Hydrogen is supplied into the pressurized interior of the chamber comprising the heated poly-si and the heated filament. Atomic hydrogen is produced by the filament at a rate whereby the atomic hydrogen surface density at the poly-si is less than the poly-si surface density. Preferably, the poly-si is covered from the atomic hydrogen produced by the heated filament for a first predetermined covering time. Preferably, the poly-si is then uncovered from the atomic hydrogen produced by the heated filament for a first hydrogenation time.
Original languageAmerican English
Patent number8,580,661
Filing date12/11/13
StatePublished - 2013

NREL Publication Number

  • NREL/PT-5000-70209

Keywords

  • atomic hydrogen
  • chamber
  • hydrogenating
  • poly-si
  • pressurized interior
  • surface density

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